薄膜電容濕度傳感器結(jié)構(gòu)：

Upper electrode 上層電極

• conductive material 傳導(dǎo)材料

• protects the active material of the sensor from dust, dirt and conductive particles 保護(hù)傳感器的主要材料不受灰塵 , 污垢和導(dǎo)電粒子 的影響

• lets through water vapor 使水蒸汽通過 • functions as one of the two electrodes in a capacitor 做為電容兩極中 的一極

Active material 活性材料

• active polymer film 活性聚合物薄膜

• absorbs water vapor: amount is a function of ambient relative humidity 吸收水蒸汽 : 吸收量和周圍環(huán)境的相對(duì)濕度有函數(shù)關(guān)系 Lower electrode 下層電極

• made of conductive material 由傳導(dǎo)材料做成 • functions as one of the two electrodes in a capacitor 做為電容兩極中 的一極 Glass substrate 玻璃基底

• base that supports the sensor structure 支撐傳感器結(jié)構(gòu)